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掺铝氧化锌薄膜的光学性能研究
掺铝氧化锌薄膜的光学性能研究
摘要:掺铝氧化锌（ZAO）是1种备受关注的新型透明导电薄膜材料。它的很多优点显示，它是替代目前应用广泛的In2O3∶Sn(ITO)薄膜的最佳薄膜材料。与In2O3∶Sn（ITO）薄膜相比，ZAO薄膜具有原材料的自然界储量丰富、易于制造、成本低廉、无毒、热稳定性和化学稳定性好等优点，因此，其必将成为新1代透明导电氧化物薄膜的代表。我们采用直流磁控溅射制备技术进行ZAO薄膜的制备实验。用原子力显微镜、台阶仪、紫外-可见分光光度计、椭偏仪等测试手段对制备的样品进行组织结构、光学分析。
从大量的制备ZAO薄膜实验数据中，分析直流磁控溅射制备工艺参数对ZAO薄膜性能的影响，总结出最佳制备工艺参数: 靶基距为7cm，沉积工作压强保持为0.5Pa,然后调节氧氩分压比为1%，加热玻璃基片到200 oC，以150W左右的溅射功率进行直流反应磁控溅射15min左右，最后在真空环境中退火处理1小时，退火温度为200oC。在最佳工艺条件下制备出的ZAO薄膜的主要性能为:膜厚在600nm左右，可见光区平均透射率为89.2%，光学性能能满足使用的需求。
本论文主要从薄膜的结构、光学特性变化的机理入手，为进1步全面研究ZAO薄膜的制备、结构特性、光学特性打下了坚实的基础，也对ZAO薄膜的实际应用具有积极意义。
关键词：ZAO薄膜，直流磁控溅射，可见光透射率，光学性能
The Al-doped ZnO(ZAO) thin film optical properties research
Abstract : Aluminum-doped zinc oxide (ZAO) is a new area of concern transparent conductive film. Its many advantages, it is a replacement of the current widespread use of In2O3∶Sn (ITO) films the best film material. And In2O3∶Sn (ITO) film, the film is ZAO raw materials rich in natural reserves, easy to manufacture, low-cost, nontoxic, thermal stability and good chemical stability advantages, therefore, will be the next generation of its transparent conductive oxide films representatives. We dc magnetron sputtering technique ZAO Films Preparation. Atomic force microscope, level sensor, UV-VIS spectrophotometer, ellipsometer, and other means of testing the sample preparation organizational structure, Optical analysis. Preparation from a large number of experimental data ZAO films, Analysis of DC magnetron sputtering process parameters on the performance of ZAO films, summed up best Preparation of parameters : target-substrate distance of 7 cm, sedimentary work to maintain the pressure for 0.5 Pa, and then adjusted partial pressure of oxygen and argon ratio of 1%. glass substrate heating to200oC. to about 150 W power for the sputtering DC reactive magnetron sputtering about 15 min. Finally in a vacuum environment annealing an hour, annealing temperature of200oC. In optimum conditions produced a film ZAO the main properties : 600 nm in thickness around, visible average transmission rate of 89.2%, optical properties can satisfy the demand. This paper mainly from the films structure, changes in the optical properties of the mechanism for further comprehensive study of ZAO Films Preparation, structural properties, optical properties lay a solid foundation for ZAO Films practical application of positive significance.
Keywords : ZAO film, DC magnetron sputtering, visible light transmittance, optical properties
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